Sign In | Join Free | My lightneasy.org
China Hunan Huitong Advanced Materials Co., Ltd. logo
Hunan Huitong Advanced Materials Co., Ltd.
Innovating & Developing Cooperating & Win together The Leading Solutions Provider in Metal Fiber
Verified Supplier

5 Years

Home > Short Fiber >

1μm Metal Filter Media For Semi-conductor Process Gas Purification ---Wafer Manufacture With AMC Control

Hunan Huitong Advanced Materials Co., Ltd.
Trust Seal
Verified Supplier
Credit Check
Supplier Assessment
Contact Now

1μm Metal Filter Media For Semi-conductor Process Gas Purification ---Wafer Manufacture With AMC Control

  • 1
  • 2
  • 3

Brand Name : Huitong

Model Number : Ultrafine Short fiber

Certification : SGS

Place of Origin : Yiyang,China

MOQ : 1kg

Price : Negotiable

Payment Terms : L/C,T/T

Supply Ability : 500kg/month

Delivery Time : Depends on quantity

Packaging Details : Paper carton

Length : 80-100um

Packing : flexible

Application : Semi-conductor Gas Filter/High Purity Gas Filters Solution

Material : Stainless steel 316L/Hastelloy C22/C59/Nickel 200

Diameter : 1um/1.5um/2um

Contact Now

1μm Metal Filter Element(Nanoscale)for Semi-conductor Process Gas Purification


Product type: Ultrafine 316L stainless steel short fiber

Fiber Diameter: 1um/1.5um/2um available

Cut Length: 80-100um

Chemical Composition of Raw material( Wt% )

Elements

C

Si

Mn
Ni
Cr
Mo
S
P
Standard
≤0.03
≤1.00
≤2.00
10~14
16~18
2~3
≤0.03
≤0.045
Value
0.028
0.56
0.5
10.85
16.97
2.1
0.003
0.027


In semiconductor manufacturing, maintaining ultra-high purity process gases is critical to prevent defects and ensure high yields. 1μm metal filter media play a vital role in gas purification by removing particulate contaminants while also contributing to Airborne Molecular Contamination (AMC) control, which is essential for advanced wafer fabrication.

Key Features & Benefits

High-Efficiency Filtration (1μm Retention)

Captures sub-micron particles that could cause defects in photolithography, etching, and deposition processes.

Reduces risk of wafer surface contamination, improving yield.

Chemically Inert & Corrosion-Resistant

Made from high-purity stainless steel (316L), nickel, or sintered alloys for compatibility with aggressive gases (e.g., HF, HCl, NH₃).

Resists outgassing, preventing additional contamination.

AMC Control Capability

Some advanced metal filters incorporate surface treatments or coatings (e.g., passivation, electropolishing) to minimize adsorption/desorption of volatile organics or acids.

Helps meet SEMI F21 AMC Class 1 requirements for sensitive processes like EUV lithography.

High Temperature & Pressure Resistance

Stable performance in harsh conditions (up to 500°C or higher for some alloys).

Suitable for CVD, diffusion, and ion implantation gas lines.

Long Service Life & Cleanability

Reusable after cleaning (ultrasonic, chemical, or thermal methods), reducing cost of ownership.

Low pressure drop design for energy-efficient gas flow.

Applications in Semiconductor Manufacturing

Ultra-high purity (UHP) gas delivery (N₂, Ar, H₂, O₂, etc.)

Etch & deposition processes (CVD, PVD, ALD)

Photolithography (AMC-sensitive EUV/DUV environments)

Bulk gas & point-of-use (PoU) filtration

Why Metal Filters Over Alternatives?

Superior durability vs. polymeric filters (which can degrade and shed particles).

No fiber shedding unlike traditional HEPA/ULPA filters.

Better AMC mitigation compared to standard particulate filters.

Compliance & Standards

SEMI F20 (Particulate Control)

SEMI F21 (AMC Classification)

ISO 14644-1 (Cleanroom Standards)

Conclusion

1μm metal filter media is a robust solution for semiconductor gas purification, combining particulate filtration, AMC control, and chemical resistance to meet the stringent demands of advanced wafer fabrication.


Buy cheap 1μm Metal Filter Media For Semi-conductor Process Gas Purification ---Wafer Manufacture With AMC Control product

1μm Metal Filter Media For Semi-conductor Process Gas Purification ---Wafer Manufacture With AMC Control Images

Inquiry Cart 0
Send your message to this supplier
 
*From:
*To: Hunan Huitong Advanced Materials Co., Ltd.
*Subject:
*Message:
Characters Remaining: (0/3000)